CVD Furnace

Andy Group , Since 2003

Your Valuable, Trustworthy Partner ; Your Strong, Reliable Backing !

A Leading Supplier

In Advanced High Thermal Material And Equipment with high quality !


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Furnace Features

CVD Furnace Specification

  1. MAX TEMPERATURE: 1000℃/ 1200℃ /1300℃/ 1400℃ /1500℃/ 1600℃/1700℃/1800℃

  2. NORMAL VACUUM: -0.1MPa

  3. MAX VACUUM: Configuration Molecular Pump, Vacuum 7×10-4 Pa (Optional)

  4. FLANGE: 304 Stainless Steel Sealing Flange

  5. OVER-TEMPERATURE PROTECTION: Automatic Power-off When The Temperature Exceeds The Allowable Set Value

  6. SAFETY PROTECTION: Automatically Power Off When The Furnace Body Leaks

  7. FURNACE STRUCTURE: Double Layer Steel Dual Cooling Fan, Surface Temperature Below 50℃

  8. MAX HEATING RATE: 20°C /min

  9. TEMPERATURE ACCURACY: ±1℃

  10. TEMPERATURE UNIFORMITY: ±5℃

  11. TEMPERATURE CONTROL: 50 Segments Programmable And Auto Control

  12. APPLICATION: CVD Testing

  13. High-quality MoSi2 or SiC or FeCrAl heating element according to temperature different imported Japan ,Europe, USA

  14. Ceramic fiber chamber imported from Japan ,Europe.

  15. 30-51 segments programmable and PID auto control

  16. With over-temperature alarm function

  17. Double layer of furnace shell with fan cooling, the Surface temperature is less than 50℃

Optional Spares

  • Vacuum system (Rotary vane vacuum pump, Diffusion pump, Molecular pump)

  • Atmosphere system (Float flow meter, Mass flow meter)

  • Quick release flange, Multi-way flange

  • Touching screen temperature controller

Furnace Chamber Size